Presentations
Fusion and Plasmas Dynamics Laboratory
- "Estimation of SiO2 Deposition Process Plasma Temp
- 관리자 |
- 2022-07-06 10:29:50|
- 43
- 2022-07-06 10:29:50|
S. Hwang, J. Y. Lee, W. S. Kang, C. Sung*
"Estimation of SiO2 Deposition Process Plasma Temperature and Density using Helium Collisional-Radiative Model"
Korea Accelerator and Plasma Research Association, 2022
"Estimation of SiO2 Deposition Process Plasma Temperature and Density using Helium Collisional-Radiative Model"
Korea Accelerator and Plasma Research Association, 2022