Plasma Engineering

Fusion and Plasmas Dynamics Laboratory

Plasma has been used in various fields. Fusion reactions in the plasma can be utilized for neutron production, applicable in material test for fusion reactor and relevant industry such as medical field. In addition, plasma is utilized for etching and deposition in semiconductor manufacturing. We will pursue plasma engineering study.

Plasma Engineering
  • On-going Projects
    • [Fundamental study for data driven plasma processing development and control] with KIMM

      Development of a methodology and necessary technology for data driven plasma science research that can be used for plasma modeling of semiconductor processes.

      Development of basis for technologies required to control etching/deposition rate and uniformity, which have a great influence on semiconductor manufacturing efficiency and yield.

      Contribution to plasma process prediction and control module development.