Presentations
Fusion and Plasmas Dynamics Laboratory
- Development of a New Neutral Beam Etching Device f
- 관리자 |
- 2024-01-18 10:06:32|
- 21
- 2024-01-18 10:06:32|
Dongha Kim, Donguk Kim, Bongki Jung, Namkyun Kim, Seungbo Shim, and Choongki Sung
Development of a New Neutral Beam Etching Device for High Aspect Ratio Contact Process
"The 9th International conference on microelecronics and plasma technology (ICMAP 2024)"
Development of a New Neutral Beam Etching Device for High Aspect Ratio Contact Process
"The 9th International conference on microelecronics and plasma technology (ICMAP 2024)"