Presentations
Fusion and Plasmas Dynamics Laboratory
- Development of a Neutral Beam Etching Device for H
- 관리자 |
- 2025-11-10 20:24:27|
- 36
- 2025-11-10 20:24:27|
Dongha Kim, Donguk Kim, Bongki Jung, SeongCheol Kim, Seungbo Shim, Kihyun Lee, and Choongki Sung
Development of a Neutral Beam Etching Device for High Aspect Ratio Contact Process
"4th International Fusion and Plasma Conference"
Development of a Neutral Beam Etching Device for High Aspect Ratio Contact Process
"4th International Fusion and Plasma Conference"